Nanotechnology is a key-technology, leading to various new products or product improvements. The ongoing technological trend of miniaturization demands control of processes on the atomic scale. This demand is already required in microelectronics, micromechanics, sensors, solarindustry or just to mention battery-R&D. To enable the development of nanotechnological products and assure quality control special microscopy and microscopes are needed. Especially if 3D information with atomic resolution is required.